Imec researchers have combined GaN-on-SOI technology with trench isolation for the monolithic integration of GaN-based devices. The aim has been to isolate the devices by etching a trench through GaN and Si into the SiO2 buried layer, and as so enable the monolithic integration of GaN circuits, such as half-bridges.
If you are new to the GaN-IC technology, you can benefit from our video tutorial below revealing the advantages of using imec’s GaN-IC and unlocking its potential. You can also download the tutorial slides in PDF format.
In addition, here you can find key electrical parameters for GaN-IC 650V.
imec GaN-IC Technology
In this technology, a GaN layer is epitaxially grown on a 200mm SOI wafer (Si(100)/SiO2/Si(111)) using metal-organic chemical vapor deposition (MOCVD). The stack consists of an AlN nucleation layer, an (Al)GaN buffer layer, a GaN channel layer, an AlGaN barrier layer and a Mg-doped p-GaN layer. Delicate strain engineering is performed to control the stress built up in the wafer during growth, resulting in a GaN-on-SOI wafer with controlled warpage and good mechanical strength. Furthermore, e-mode p-GaN HEMTs can be processed and TiN/p-GaN stacks used for the gates.
– Integrate multiple transistors on a single IC using trench isolation.
– Save package cost by packaging one instead of multiple devices
– Reduce system parasitic inductance.
To use the full potential of the fast switching speed of GaN power devices, the drivers should be co-integrated to lower the parasitic inductance. Further functionality can be added through the low-voltage logic and analog switches, the high-ohmic and low-ohmic resistors and the integrated MIM-capacitors.
High power switching and power conversion: 200V and 650V
Design kits version
v.1.3.6 at 200V
v.1.1 650V available as from July 16th, 2020
The PDK includes process documentation, library devices, layout guidelines for custom design, verification and models.
– Low-ohmic and high-ohmic resistors
– Metal/oxide/metal capacitors
– Low voltage logic devices
– Cu RDL special features on 650V PDK and on 200V PDK (1 December 2020)
Typical Turnaround time
Approximately 26 weeks since MPW submission deadline, it includes already 6 weeks of DRC iterations