Important notes: Dates are Registration deadlines. Final GDSII file must be submitted within 10 days after this date.
1 Additional MPW runs offered only when the cumulative area > 10 mm²
2 Additional MPW runs offered only when the cumulative area > 18 mm²
3 Additional MPW runs offered only when the cumulative area > 25 mm²
MEMRES is available for the IHP SG13S technology with extra charge only for the runs on 25 June and 26 November
TSV is available for IHP SG13S and SG13G2 technologies with extra charge
Cu Pillar and Bumping are available for all IHP technologies with extra charge
Local Backside Etching (LBE) is not offered for EPIC runs and runs with Cu-BEOL