EUROPRACTICE customers can access the following TSMC technologies.
The 0.18 HV technololgy is based on the 1.8V/5V MS technology and adds 5V, 6V, 7V, 8V, 12V, 16V, 20V, 24V, 29V, 36V, 45V, 55V, 65V and 70V devices, aiming for high-voltage power management and automotive applications.
0.18µm CMOS High Voltage BCD Gen II | |
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Technology characteristics | Shrink technology: NO Core voltage1.8V I/O voltage 5V Shallow Trench Isolation (STI) Wells: Retrograde four well on -100- P- substrate wafer. Four LV wells, two HV wells and N+ Buried Layer (NBL) Substrate resistivity 8~12 ohm.cm on -100- P- substrate Standard Vt Temperature range -40C to 150C # of metals: 3 to 6 Interconnect material: AlCu Interconnect dielectric: FSG Top metal: 8KA, 15KA, 30KA or 40KA CMP on STI, contact, via and inter-metal dielectric layers OTP / MTP MoM MiM: 1fF/µm2 or 2fF/µm2, mutual exclusive Passivation: single |
Wafer size | 8 inch
|
Deliverables | # of dies (no wafer!): 40 dies / wafer |
Design tools | PDK: Cadence CDBA and OA |
Simulation tools | HSPICE, Eldo, Spectre
|
Verification tools DRC | Cadence, Mentor Graphics
|
Verification tools LVS
| Cadence, Mentor Graphics
|
Parasitic extraction tools
| Cadence, Synopsys
|
P&R tools
| Cadence, Synopsys
|
Foundry IP
| 10-track core cell library, with 5V I/O devices, SVt
1.8V/5V linear universal standard I/O
5V/5V linear universal standard I/O
SRAM compilers by ARM, Dolphin Integration, Synopsys
|
MPW block size
| Min. 25 mm2, flexible aspect ratio
|
Mini@sic characteristics
|
TSMC 0.18 µm technology with 6 metal layers. Highly suited for MS/RF applications for today’s IoT and smart wearable innovations.
0.18µm CMOS Logic or MS/RF, General Purpose 1.8V/3.3V | |
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Technology characteristics | Shrink technology: NO Core voltage1.8V I/O voltage 3.3V Shallow Trench Isolation (STI) Triple well (retrograde NW, PW and optional DNW) Substrate resistivity 8~12 ohm.cm on <100> P- substrate Standard Vt, Medium Vt NMOS and medium Vt PMOS, native NMOS HRI poly resistor Temperature range -40C to 125C # of metals: 3 to 6 Interconnect material: AlCu Interconnect dielectric: FSG Top metal: 8KA, 20KA or 40KA RDL: 8KA, limited offer in FAB8 Inductors MoM MiM: 1fF/µm2 or 2fF/µm2, mutual exclusive Passivation: single |
Options that need special attention
| OTP / MTP
|
Wafer size | 8 inch
|
Deliverables | 40 dies / wafer |
Design tools | Cadence CDBA, Cadence OA, TSMC iPDK
|
Simulation tools | HSPICE, Eldo, Spectre
|
Verification tools DRC | Magma, Cadence, Synopsys, Mentor Graphics
|
Verification tools LVS
| Magma, Cadence, Synopsys, Mentor Graphics
|
Parasitic extraction tools
| Cadence, Synopsys, Mentor Graphics
|
P&R tools
| Cadence, Synopsys
|
Foundry IP
| Standard cells: 7-track. Gate density >= 140KGates / mm2 I/O library 3.3V SRAM: from third party |
MPW block size
| Min. 25 mm2, flexible aspect ratio
|
Mini@sic characteristics
| Supported Min area: 3mm2 mini@sic Technology options |
TSMC 0.18 µm technology with 6 metal layers. Highly suited for MS/RF applications for today’s IoT and smart wearable innovations.
0.18µm CMOS Logic or MS/RF, General Purpose 1.8V/5V | |
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Technology characteristics | Shrink technology NO Core voltage1.8V I/O voltage 5V Shallow Trench Isolation (STI) Triple well (retrograde NW, PW and optional DNW) Substrate resistivity 8~12 ohm.cm on <100> P- substrate Standard Vt, Medium Vt NMOS and medium Vt PMOS HRI poly resistor Temperature range -40C to 125C # of metals: 3 to 6 Interconnect material: AlCu Interconnect dielectric: FSG Top metal: 8KA, 20KA or 40KA RDL: 8KA, limited offer in FAB8 Inductors MoM MiM: 1fF/µm2 or 2fF/µm2, mutual exclusive Passivation: single |
Options that need special attention
| OTP / MTP
|
Wafer size | 8 inch
|
Deliverables | 40 dies / wafer |
Design tools | Cadence CDBA, Cadence OA, TSMC iPDK
|
Simulation tools | HSPICE, Eldo, Spectre
|
Verification tools DRC | Magma, Cadence, Synopsys, Mentor Graphics
|
Verification tools LVS
| Magma, Cadence, Synopsys, Mentor Graphics
|
Parasitic extraction tools
| Cadence, Synopsys, Mentor Graphics
|
P&R tools
| Cadence, Synopsys
|
Foundry IP
| Standard cells: 7-track. Gate density >= 140KGates / mm2 I/O library 3.3V SRAM: from third party |
MPW block size
| Min. 25 mm2, flexible aspect ratio
|
Mini@sic characteristics
| Not supported
|
For applications in consumer electronics, computers, mobile computing, automotive electronics, IoT, and smart wearables.
0.13µm CMOS Logic or MS/RF, General Purpose | |
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Technology characteristics | Shrink technology: NO Core voltage: 1.2V I/O voltage: 2.5 or 3.3V Shallow Trench Isolation (STI) Wells: Retrograde twin well cmos technology on <100> P-substrate. Substrate resistivity 8-12ohm-cm Tripple Well, Deep N-well (optional) Vt options: lvt, svt, hvt,uhvt, native Temperature range: -40C to 125C # of metals: 3 to 8 +ALRDL Interconnect dielectric: FSG Top metal: 8KA CMP on STI, contact, via and inter-metal dielectric layers MoM Varactors |
MS/RF options | MIM capacitor for MS & RF process: 1fF/µm2 High-Q copper inductor Top metal: UTM, 33.5K Single passivation, Dual passivation optional |
Wafer size | 8/12 inch
|
Deliverables | # of dies (no wafer!): 40-dies (8″), 100 dies (12″) / wafer
|
Design tools | PDK: Cadence CDBA and OA, Mentor
|
Simulation tools | HSPICE, Eldo, Spectre
|
Verification tools DRC | Cadence, Mentor Graphics
|
Verification tools LVS
| Cadence, Mentor Graphics
|
Parasitic extraction tools
| Cadence, Mentor Graphics
|
P&R tools
| Cadence, Synopsys
|
Foundry IP
| 9-track core cell library, with 5V I/O devices, SVt 1.2/3.3V regular,linear universal standard I/O 1.2V/2.5V & 1.2/3.3V Universal Analog I/O compatible with Linear Universal Standard I/O 1.2V/2.5V & 1.2/3.3V , hybrid linear slim I/O library that contains both standard and analog slim I/O 5V tolerant, linear universal standard I/O 1.2V/3.3V, 5V tolerant, staggered universal standard I/O SRAM compilers from 3rd party |
MPW block size
| Min. 25 mm2, flexible aspect ratio
|
Mini@sic characteristics
| Not supported
|
For applications in consumer electronics, computers, mobile computing, automotive electronics, IoT, and smart wearables.
0.13µm CMOS Logic or MS/RF, Low Power | |
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Technology characteristics | Shrink technology: NO Core voltage: 1.5V I/O voltage: 2.5 or 3.3V Shallow Trench Isolation (STI) Wells: Retrograde twin well cmos technology on <100> P-substrate. Substrate resistivity 8-12ohm-cm Tripple Well, Deep N-well (optional) Vt options: lvt, svt, native Temperature range: -40C to 125C # of metals: 3 to 8 (CU) (+ALRDL) Interconnect dielectric: FSG Top metal: 8KA CMP on STI, contact, via and inter-metal dielectric layers MoM Varactors |
MS/RF options | MIM capacitor for MS & RF process: 1fF/µm2 High-Q copper inductor Top metal: UTM, 33.5K Single passivation, Dual passivation optional |
Wafer size | 8/12 inch
|
Deliverables | # of dies (no wafer!): 40-dies (8″), 100 dies (12″) / wafer
|
Design tools | PDK: Cadence CDBA and OA, Mentor
|
Simulation tools | HSPICE, Eldo, Spectre
|
Verification tools DRC | Cadence, Mentor Graphics
|
Verification tools LVS
| Cadence, Mentor Graphics
|
Parasitic extraction tools
| Cadence, Mentor Graphics
|
P&R tools
| Cadence, Synopsys
|
Foundry IP
| 9-track core cell library
|
MPW block size
| Min. 25 mm2, flexible aspect ratio
|
Mini@sic characteristics
| Not supported
|
This is a general-purpose product for applications with a 1.0V core design and with 1.8, 2.5 or 3.3V capable IO’s for digital consumer, Networking , HDD and FPGA.
90nm CMOS Logic or MS/RF, General Purpose | |
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Technology characteristics | Shrink technology: NO Core voltage: 1.0V I/O voltage: 1.8, 2.5 or 3.3V Shallow Trench Isolation (STI) Wells: Retrograde twin well cmos technology on P-substrate Tripple Well, Deep N-well (optional) Multiple Vt options (lvt, svt, hvt, native) Dual gate oxide and tripple gate oxide process Temperature range: -40C to 125C # of metals: 3 to 9 (+ALRDL) Interconnect material: Cu + AlCu pad LK inter-metal dielectric for thin metal Top metal: 5.6 KA, 8.5KA CMP on STI, contact, via and inter-metal dielectric layers MoM |
MS/RF options
| MIM capacitor for MS & RF process: 1.0, 1.5, 2.0 fF/µm2(mutually exclusive) High-Q copper inductor Top metal: UTM, 34KA Varactors Dual passivation |
Options that need special attention
| Fuse RAM
|
Wafer size | 12 inch
|
Deliverables | # of dies (no wafer!): 100 dies / wafer (12″)
|
Design tools | PDK: Cadence CDBA, Cadence OA, Mentor, iPDK
|
Simulation tools | Hspice, Eldo, Spectre
|
Verification tools DRC | Cadence, Mentor Graphics
|
Verification tools LVS
| Cadence, Mentor Graphics
|
Parasitic extraction tools
| Cadence, Mentor Graphics
|
P&R tools
| Cadence, Synopsys
|
Foundry IP
| 7,9,14-track core cell library, multi-Vt 1.0V/2.5V &1.0V/3.3V hybrid staggered slim I/O library that contains both standard and analog slim I/O 1.0V/2.5V &1.0V/3.3V linear staggered slim I/O library that contains both standard and analog slim I/O 1.0v/2.5v, 3.3v tolerant, staggered universal standard I/O 1.0V/3.3V, 5V Tolerant, Staggered Universal Standard I/O SRAM compilers from 3rd party |
MPW block size
| 16 mm2, flexible aspect ratio
|
Mini@sic characteristics
| Not supported
|
This is a general-purpose product for applications with a 1.2V core design and with 2.5 or 3.3V capable IO’s for mobile applications, such as Cellular, WLAN, BT.
90nm CMOS Logic or MS/RF, Low Power | |
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Technology characteristics | Shrink technology: NO Core voltage: 1.2V I/O voltage: 2.5 or 3.3V Shallow Trench Isolation (STI) Wells: Retrograde twin well cmos technology on P-substrate Tripple Well, Deep N-well (optional) Multiple Vt options (ulvt, lvt, svt, hvt, native) Dual gate oxide and tripple gate oxide process Temperature range: -40C to 125C # of metals: 3 to 9 (CU) (+ALRDL) Interconnect material: Cu + AlCu pad LK inter-metal dielectric for thin metal Top metal: 5.6 KA, 8.5KA CMP on STI, contact, via and inter-metal dielectric layers MoM Varactors |
MS/RF options
| MIM capacitor for MS & RF process: 1.0, 1.5, 2.0 fF/µm2(mutually exclusive) Ultra Low Vt High-Q copper inductor Top metal: UTM, 34KA Dual passivation |
Options that need special attention
| Fuse RAM
|
Wafer size | 12 inch
|
Deliverables | # of dies (no wafer!): 100 dies / wafer (12″)
|
Design tools | PDK: Cadence CDBA and OA
|
Simulation tools | Hspice, Eldo, Spectre
|
Verification tools DRC | Cadence, Mentor Graphics
|
Verification tools LVS
| Cadence, Mentor Graphics
|
Parasitic extraction tools
| Cadence, Mentor Graphics
|
P&R tools
| Cadence, Synopsys
|
Foundry IP
| 7,9,14-track core cell library, multi-Vt 1.2v/2.5v &1.2V/3.3V Universal Analog I/O compatible with Linear Universal Standard I/O 1.2V/2.5V & 1.2V/3.3V Regular, Linear Universal Standard I/O 1.2V/3.3V, regular, linear standard slim I/O 1.2V/3.3V, hybrid staggered slim I/O library that contains both standard and analog slim I/O SRAM compilers from 3rd party |
MPW block size
| 16 mm2, flexible aspect ratio
|
Mini@sic characteristics
| Not supported
|
It is a popular and well supported node.
65nm CMOS Logic or MS/RF, General purpose | |
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Technology characteristics | Shrink technology: NO Core voltage: 1.0V I/O voltage: 2.5V (1.8V underdrive, 3.3V overdrive) Shallow Trench Isolation (STI) Wells: Retrograde twin well for low well sheet resistance and better latch-up behavior. Optional Deep N-Well <100> P- substrate wafer. Substrate resistivity 8-12ohm-cm Dual Gate Oxide (1 for core, 1 for IO) Vt options: lvt, svt, hvt, native Temperature range: -40C to 125C # of metals: 3 to 9 Cu + alrdl Interconnect dielectric: LK Top metal: 5KA, 9KA, 12.5KA, 34KA CMP on STI, contact, metals, vias and passivation MoM MiM density: 1fF/µm2, 1.5fF/µm2 or 2fF/µm2, mutually exclusive Passivation: dual layers |
Options that need special attention
| OTP/MTP SRAM Cell |
Wafer size | 12 inch
|
Deliverables | # of dies (no wafer!): 100 dies / wafer
|
Design tools | PDK: Cadence CDBA and OA, TSMC iPDK, Mentor
|
Simulation tools | HSPICE, Eldo, Spectre
|
Verification tools DRC | Cadence, Mentor Graphics, Synopsys, Magma, TSMC iDRC
|
Verification tools LVS
| Cadence, Mentor Graphics, Synopsys, Magma
|
Parasitic extraction tools
| Cadence, Mentor Graphics, Synopsys
|
P&R tools
| Cadence, Synopsys
|
Foundry IP
| 12-track / 10-track / 9-track core cell libraries, multi-vt, coarse grain 1.0V/2.5V staggered (fail-safe digital, 5V input tolerant digital, hybrid small footprint digital/analog and regular analog) I/O library SRAM compilers from 3rd party |
MPW block size
| 12 mm2
|
Mini@sic characteristics
| Not supported
|
It is a popular and well supported node.
65nm CMOS Logic or MS/RF, Low Power | |
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Technology characteristics | Shrink technology: NO Core voltage: 1.2V I/O voltage: 2.5V (1.8V underdrive, 3.3V overdrive) Shallow Trench Isolation (STI) Wells: Retrograde twin well for low well sheet resistance and better latch-up behavior. Optional Deep N-Well <100> P- substrate wafer. Substrate resistivity 8-12ohm-cm Dual Gate Oxide (1 for core, 1 for IO) Vt options: lvt, svt, hvt, mLowvt, native Temperature range: -40C to 125C # of metals: 3 to 9 Cu + alrdl Interconnect dielectric: LK Top metal: 5KA, 9KA, 12.5KA, 34KA CMP on STI, contact, metals, vias and passivation MoM MiM density: 1fF/µm2, 1.5fF/µm2 or 2fF/µm2, mutually exclusive Passivation: dual layers |
Options that need special attention
| OTP/MTP SRAM Cell |
Wafer size | 12 inch
|
Deliverables | # of dies (no wafer!): 100 dies / wafer
|
Design tools | PDK: Cadence CDBA and OA, TSMC iPDK, Mentor
|
Simulation tools | HSPICE, Eldo, Spectre
|
Verification tools DRC | Cadence, Mentor Graphics, Synopsys, Magma, TSMC iDRC
|
Verification tools LVS
| Cadence, Mentor Graphics, Synopsys, Magma
|
Parasitic extraction tools
| Cadence, Mentor Graphics, Synopsys
|
P&R tools
| Cadence, Synopsys
|
Foundry IP
| 12-track / 10-track / 9-track / 7-track core cell libraries, multi-vt, coarse grain 1.2V/2.5V staggered (fail-safe digital, 5V input tolerant digital, hybrid small footprint digital/analog and regular analog) I/O library 1.2V/2.5V linear (digital, hybrid small footprint digital/analog and regular analog) I/O library SRAM compilers |
MPW block size
| 12 mm2
|
Mini@sic characteristics
|
Well supported advanced node, 40G = 45GS.
40nm CMOS Logic or MS/RF, General Purpose | |
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Technology characteristics | Shrink technology: YES Core voltage: 0.9V I/O voltage: 2.5V (1.8V underdrive, 3.3V overdrive) or true 1.8V Shallow Trench Isolation (STI) Wells: Retrograde twin well for low well sheet resistance and better latch-up behavior. Optional Deep N-Well <110> P- substrate wafer. Substrate resistivity 8-12ohm-cm Dual Gate Oxide (1 for core, 1 for IO) Vt options: lvt, svt, hvt, native Temperature range: -40C to 125C # of metals: 3 to 10 Cu + alrdl Interconnect dielectric: ELK Top metal: 3.1KA, 9KA, 12.5KA, 34KA CMP on STI, contact, metals, vias and passivation MoM Passivation: dual layers |
Options that need special attention
| OTP/MTP SRAM Cell |
Wafer size | 12 inch
|
Deliverables | # of dies (no wafer!): 100 dies / wafer
|
Design tools | PDK: Cadence CDBA and OA, TSMC iPDK
|
Simulation tools | HSPICE, Eldo, Spectre
|
Verification tools DRC | Cadence, Mentor Graphics, Synopsys, Magma, TSMC iDRC
|
Verification tools LVS
| Cadence, Mentor Graphics, Synopsys, Magma, TSMC iLVS
|
Parasitic extraction tools
| Cadence, Mentor Graphics, Synopsys
|
P&R tools
| Cadence, Synopsys
|
Foundry IP
| 12-track / 9-track core cell libraries, multi-vt, coarse grain 0.9V/1.8V staggered (fail-safe digital, 5V input tolerant digital and regular analog) I/O library 0.9V/2.5V staggered (fail-safe digital, 5V input tolerant digital and regular analog) I/O library SRAM compilers |
MPW block size
| 9 mm2
|
Mini@sic characteristics
| Not supported
|
It is a well supported advanced node.
40nm CMOS Logic or MS/RF, Low Power | |
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Technology characteristics | Shrink technology: YES (90% linear shrink) Core voltage: 1.1V I/O voltage: 2.5V (1.8V underdrive, 3.3V overdrive) Shallow Trench Isolation (STI) Wells: Retrograde twin well for low well sheet resistance and better latch-up behavior. Optional Deep N-Well <110> P- substrate wafer. Substrate resistivity 8-12ohm-cm Dual Gate Oxide (1 for core, 1 for IO) Vt options: lvt, svt, hvt, native Temperature range: -40C to 125C # of metals: 3 to 10 Cu + alrdl Interconnect dielectric: ELK Top metal: 3.1KA, 9KA, 12.5KA, 34KA CMP on STI, contact, metals, vias and passivation MoM Passivation: dual layers |
Options that need special attention
| OTP/MTP SRAM Cell |
Wafer size | 12 inch
|
Deliverables | # of dies (no wafer!): 100 dies / wafer
|
Design tools | PDK: Cadence CDBA and OA, TSMC iPDK, Mentor
|
Simulation tools | HSPICE, Eldo, Spectre
|
Verification tools DRC | Cadence, Mentor Graphics, Synopsys, Magma, TSMC iDRC
|
Verification tools LVS
| Cadence, Mentor Graphics, Synopsys, Magma, TSMC iLVS
|
Parasitic extraction tools
| Cadence, Mentor Graphics, Synopsys
|
P&R tools
| Cadence, Synopsys
|
Foundry IP
| 12-track / 9-track core cell libraries, multi-vt, coarse grain 1.1V/2.5V staggered (fail-safe digital, 5V input tolerant digital, hybrid small footprint digital/analog and regular analog) I/O library SRAM compilers |
MPW block size
| 9 mm2
|
Mini@sic characteristics
|
The TSMC 28nm technology is the most performant planar mainstream solution that evolved through the years due to constant enhancements in the manufacturing process. It supports a wide range of applications, including CPUs, GPUs, high-speed networking chips, smart phones, APs, tablets, home entertainment, consumer electronics, automotive and IoT.
The 28nm RF (28HPC+ RF) technology also provides support for 110GHz mmWave and for 5G mmWave RF.
28nm CMOS HPC+ Logic, RF | |
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Technology characteristics | Shrink technology: YES Core voltage: 0.9V I/O voltage: 1.8V Shallow Trench Isolation (STI) Wells: Retrograde twin well for low well sheet resistance and better latch-up behavior. Triple well, Deep N-Well in option Dual Gate Oxide Vt options: ulvt, lvt, svt, hvt, uhvt, ehvt 5V HVMOS HighRes resistors Temperature range: -40C to 125C # of metals: 5 to 10 Cu + ALRDL Interconnect dielectric: ELK Top metal: 8.5KA, 11.5KA, 35KA CMP on STI, contact, via and passivation MoM capacitor Passivation: dual layers |
Options that need special attention
| SRAM Cell Vt’s: maximum of 4 VT types in one design. |
Wafer size | 12 inch
|
Deliverables | 100 dies, no wafer
|
Design tools | PDK: TSMC iPDK
|
Simulation tools | HSPICE, Eldo, Spectre
|
Verification tools DRC | Cadence, Mentor Graphics, Synopsys
|
Verification tools LVS
| Cadence, Mentor Graphics, Synopsys
|
Parasitic extraction tools
| Cadence, Mentor Graphics, Synopsys
|
P&R tools
| Cadence, Synopsys
|
Foundry IP
| 12-track / 9-track / 7-track core cell libraries, multi-vt’s 0.9V/1.8V hybrid staggered (fail-safe digital and regular analog) I/O library SRAM compilers by TSMC , ARM, Synopsys |
MPW block size
| 6mm² (on silicon)
|
Mini@sic characteristics
|
The TSMC 28nm technology is the most performant planar mainstream solution that evolved through the years due to constant enhancements in the manufacturing process. It supports a wide range of applications, including CPUs, GPUs, high-speed networking chips, smart phones, APs, tablets, home entertainment, consumer electronics, automotive and IoT.
The 28nm RF (28HPC+ RF) technology also provides support for 110GHz mmWave and for 5G mmWave RF.
28nm CMOS HPC Logic, RF | |
---|---|
Technology characteristics | Shrink technology: YES Core voltage: 0.9V I/O voltage: 1.8V Shallow Trench Isolation (STI) Wells: Retrograde twin well for low well sheet resistance and better latch-up behavior. Triple well, Deep N-Well in option Dual Gate Oxide Vt options: ulvt, lvt, svt, hvt, uhvt, ehvt 5V HVMOS HighRes resistors Temperature range: -40C to 125C # of metals: 5 to 10 Cu + ALRDL Interconnect dielectric: ELK Top metal: 8.5KA, 11.5KA, 35KA CMP on STI, contact, via and passivation MoM capacitor Passivation: dual layers |
Options that need special attention
| SRAM Cell Vt’s: maximum of 4 VT types in one design. |
Wafer size | 12 inch
|
Deliverables | 100 dies, no wafer
|
Design tools | PDK: TSMC iPDK
|
Simulation tools | HSPICE, Eldo, Spectre
|
Verification tools DRC | Cadence, Mentor Graphics, Synopsys
|
Verification tools LVS
| Cadence, Mentor Graphics, Synopsys
|
Parasitic extraction tools
| Cadence, Mentor Graphics, Synopsys
|
P&R tools
| Cadence, Synopsys
|
Foundry IP
| 12-track / 9-track / 7-track core cell libraries, multi-vt’s 0.9V/1.8V hybrid staggered (fail-safe digital and regular analog) I/O library SRAM compilers by TSMC , ARM, Synopsys |
MPW block size
| 6mm² (on silicon)
|
Mini@sic characteristics
|
EUROPRACTICE has recently extended its portfolio by including a flagship technology TSMC 16nm CMOS logic FinFet Compact 0.8V/1.8V. It provides superior performance and power consumption advantage for next generation high-end mobile computing, network communication, consumer and automotive electronic applications.
Since it is classified as a leading node technology, access to it is subject to review and approval by TSMC.
16nm CMOS logic FinFet Compact | |
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Technology characteristics | Shrink technology: 2% shrink Core voltage: 0.8V I/O voltage: 1.8V Shallow Trench Isolation (STI) Triple well, Deep N-Well in option Dual gate oxide Vt options: hvt, svt, lvt, ulvt, low noise vt 5V HVMOS TiN High Resistor N+/P+ metal gate allows symmetrical design of NMOS and PMOS devices Temperature range: -40C to 125C # of metals: 6 to 13 Cu plus last metal level in Al pad Interconnect dielectric: ELK HD MiM capacitors Passivation: dual layers 12 inch wafers |
Wafer size | 12 inch
|
Deliverables | 100 dies, no wafer
|
Design tools | PDK: TSMC iPDK
|
Simulation tools | HSPICE, Eldo, Spectre
|
Verification tools DRC | Cadence, Mentor Graphics, Synopsys
|
Verification tools LVS
| Cadence, Mentor Graphics, Synopsys
|
Parasitic extraction tools
| Cadence, Mentor Graphics, Synopsys
|
P&R tools
| Cadence, Synopsys
|
Foundry IP
| 9-track, 7.5-track body biased core cell libraries with gate lengths of 16, 20 and 24nm 0.8V/1.8V hybrid staggered I/O library SRAM compilers by TSMC, ARM_Artican, ARM ltd, GUC, Synopsys |
MPW block size
| 4 mm²
|
Mini@sic characteristics
| Not supported
|
Discover TSMC metal stacks options and mini@sic options available through EUROPRACTICE: